Integrated circuit industry water reuse equipment, semiconductor chip water reuse, wastewater recovery

一． 设备简介

1、 Equipment introduction

国内半导体行业近几年来的发展令人注目，特别是大型芯片制造企业在东南沿海地区蓬勃发展。芯片制造过程中要消耗大量的水，同时使用大量的化学试剂和特殊气体，排放的废水中成分复杂，因此如何选择废水处理系统，使废水处理达标，并降低其处理费用，同时充分做好中水回用，降低单位产品的能耗，节约水资源，是我们的研究重点。

The development of domestic semiconductor industry in recent years has attracted great attention, especially the large-scale chip manufacturing enterprises in southeast coastal areas. In the process of chip manufacturing, a large amount of water is consumed, and a large number of chemical reagents and special gases are used. The composition of the discharged wastewater is complex. Therefore, how to select wastewater treatment system to make the wastewater treatment meet the standard and reduce its treatment cost, and to fully reuse water, reduce the energy consumption of unit products and save water resources are our research focus.

宏洁水务的中水回用设备工艺已采用膜处理技术，包括预处理、超滤系统和反渗透(RO)系统及EDI系统（可选）几部分。由于废水通过现代技术的深度处理能够达到生产用水标准或者生活杂用水标准，使废水能够循环使用，这样企业对于废水这一块的整体运行费用得到大|大的降低，对环境保护起到很大的作用。

The water reuse equipment technology of macro clean water has adopted membrane treatment technology, including pretreatment, ultrafiltration system, RO system and EDI system (optional). Because the wastewater can meet the production water standard or the standard of domestic miscellaneous water through the advanced treatment of modern technology, the wastewater can be recycled. Therefore, the enterprise can greatly reduce the overall operation cost of the waste water, which plays a great role in environmental protection.

二． 设计标准及依据

2、 Design standard and basis

1. 根据用户提供的详细水质报告“量身定制”。

1. According to the detailed water quality report provided by the user, "customized".

2. 水处理设备技术条件《JB/T 2932-1999》

2. Technical conditions of water treatment equipment JB / T 2932-1999

3. 用于一般景观生态用水符合(CJ/T95-2000),

3. the water used for general landscape ecology meets the requirements (cj/t95-2000),

4. 用于生活杂用水应符合建设部(CJ/48-1999),

4. the water used for domestic miscellaneous water shall conform to the Ministry of construction (cj/48-1999),

5. 用于工业循环冷却水应符合(GB/T50102-2003).

5. the cooling water used for industrial circulation shall conform to gb/t50102-2003

6. 反渗透水处理设备标准《CJ/T119-2000》

6. standard for reverse osmosis water treatment equipment cj/t119-2000

7. 低压开关设备和控制设备成套装置《IEC439-1 》

7. complete set of low voltage switchgear and control equipment iec439-1

三． 工艺流程

3、 Process flow

四． 设计特点

4、 Design features

1. 系统采用全自动控制(同时亦可采用手动控制），系统运行时可设定自动反洗、再生程序；

1. The system adopts full automatic control (manual control is also available), and automatic backwashing and regeneration procedures can be set during system operation;

2. 管道一般采用UPVC材质；

2. UPVC is generally used for the pipeline;

3. 集成控制系统和集成仪表系统等，方便操作管理；

3. integrated control system and integrated instrument system, etc., which is convenient for operation and management;

4. 设备具有耗材更换自动提示功能，并且耗材的更换周期取决于水质和压力的变化，而非根据耗材的使用时间，考虑到了各地水质的差异，设计更；

4. the equipment has the function of automatic prompt for consumables replacement, and the replacement cycle of consumables depends on the change of water quality and pressure, rather than considering the difference of water quality in different places according to the usage time of consumables, the design is more important;

5. 能有效地进行固液分离，将废水中的悬浮物质、胶体物质、生物单元流失的微生物菌群与已净化的水分开。分离工艺简单，占地面积小，出水水质好，一般不须经三级处理即可回用。

5. it can effectively separate the suspended substances, colloidal substances and microbial flora lost by biological units from purified water. The separation process is simple, the floor area is small, the effluent quality is good, and it can be reused without three-stage treatment.

6. 可使生物处理单元内生物量维持在高浓度，使容积负荷大|大提高，使处理单元水力停留时间大|大的缩短，生物反应器的占地面积相应减少。

6. the biomass in the biological treatment unit can be maintained at high concentration, the volume load is greatly increased, the hydraulic retention time of the treatment unit is greatly shortened, and the occupied area of the bioreactor will be reduced accordingly.

7. 由于可防止各种微生物菌群的流失，有利于生长速度缓慢的(硝化等)的生长，从而使系统中各种代谢过程顺利进行。

7. it can prevent the loss of various microbial groups, and it is conducive to the slow growth (nitrification, etc.) growth, so that the metabolism process in the system can be smoothly carried out.

8. 使一些大分子难降解物的停留时间变长，有利于它们的分解。

8. it is beneficial to the decomposition of some macromolecular refractory compounds by making their residence time longer.

9. 膜处理技术与其它的过滤分离技术一样，在长期的运转过程中，膜作为一种过滤介质堵塞，膜的通过水量运转时间而逐渐下降有效的反冲洗和化学清洗可减缓膜通量的下降，维持MBR系统的有效使用寿命。

9. membrane treatment technology is similar to other filtration separation technologies. In the long-term operation, the membrane is blocked as a filter medium. The effective backwashing and chemical cleaning can slow down the decline of membrane flux and maintain the effective service life of MBR system.